F.Caballero-Brioncs^1,3, R. Castro-Rodríguez¹, A. Martel², and J.L. Peña^1,3

1Applied Physics Department, CINVESTAV-MERIDA, C.P. 97310, Mérida, Yuc., México, ²Facultad de Física, Universidad de la Habana, San Lázaro y L. Vedado, C.P. 10400, La Habana, Cuba, ³CICATA-IPN, Legaria 694 Col. Irrigación, C.P. 11500, México, D.F.

CdS films were prepared by chemical bath deposition with thicknesses about 750 nm on ITO/glass substrates. We consider a diffractometer setup with q fixed at different incidence angles between 0.1° and 1.7°, and 2q scanning the Bragg line. A multigaussian fit was applied to separate the cubic CdS (111) peak and hexagonal CdS (002) peak in these polymorphic CdS films. From the separated peaks we calculated their respective lattice parameters and strain. We study the evolution of both phases from the surface to the depth of the film. The results are related with the misfit parameter and tend to reach a top value. Air-annealing at 400°C during 1 hr induces reordering of the CdS layer causing a minimum in the lattice parameter at ~ 300 nm depth.