F. Caballero-Briones, R. Castro-Rodriguez* and J.L. Peña.*

CICATA-IPN, Legaria 694, Col. Irrigacion, CP 11500, México, D.F.

*Applied Physics Dept., CINVESTAV-IPN Unidad Mérida

A.P. 73 Cordemex. 97310 Mérida, Yucatán, México.

We study CdS/glass and CdS/ITO thin films grown by chemical bath deposition using the grazing incidence x-ray diffraction technique. We calculated the x-ray penetration in the CdS films at different incidence angles. We measured the main diffraction peak from 0.1 to 1.7¼ of x-ray incidence and deconvolute it in the h-(002) and c-(111) CdS peaks. From the deconvoluted peaks we calculate their respective lattice parameters. Our results for as-grown CdS/ITO, show that both the cubic and hexagonal phases lattice parameters gradually tend to reach a top value. For the hexagonal phase, this value is over the relaxed lattice and for the cubic phase it is slightly below. When using glass substrates, the lattice parameters seem to reach a minimum and then to be increased smoothly to reach a top value. For the hexagonal phase, this value is almost the one of the relaxed lattice and for the cubic is below.