ON THE OPTICAL CONSTANTS OF HEAT-TREATED TIO_{2} THIN FILM. NUMERICAL SIMULATION.

__Diana Mardare__, I. D. Bursuc

"Alexandru Ioan Cuza" University, Faculty of Physics, Iasi, 6600, Romania

In this paper we present a modelling technique of finding the optical constants of thin films

deposited onto substrates with given optical constants. TiO_{2} thin films obtained onto glass substrates by d.c. reactive sputtering, were supposed to a heat treatment in air consisting in two succesive heatings and coolings from 20°C to 400 °C.

For a given incidence angle, each equation from, represents a surface in the space (d, n_{2}, k_{2}), where Y_{0} and D_{0} are experimentally obtained, d is the thickness of the film and n_{2}, k_{2} are its optical constants. The intersection of these surfaces is a curve in the same space. For another incidence angle we obtaine another curve which intersect the first one at a solution (n_{2}, k_{2}, d). A sensitivity analysis was performed.