11th International Conference on Thin Films
19th Congress of  the Mexican Vacuum and Surface Science Society
August 30th to september 3th, 1999
 Schedule of the simultaneous session S12
thursday september 2nd
12:00-14:00

 
 
12:00-12:20
TF11.19
 CHEMICAL STABILITY OF TANTALUM DIFFUSION BARRIER BETWEEN COPPER AND SILICON
T. Laurila, K. Zeng, J.M.T. Molarius, I. Suni, and J.K.Kivilahti
12:20-12:40
TF11.21
CHEMICAL AND STRUCTURAL PROPERTIES OF ZIRCONIA-CARBON FILMS
N.Laidani, A.Nefedov, V.Micheli, and M.Anderle.
12:40-13:00
TF11.22
CHEMICAL STABILITY OF IMPURIFIED ZNO THIN FILMS
M. de la L. Olvera, A. Maldonado, R. Asomoza,and M. Meléndez-Lira
13:00-13:20
 TF11.23 R.F.-SPUTTERED TANTALUM-BASED DIFFUSION BARRIERS BETWEEN COPPER AND SILICON
J.M.T. Molarius, T.Laurila, K.Zeng, I.Suni, and J.K.Kivilahti
13:20-13:40
TF11.24
COMPUTER SIMULATION OF AC CONDUCTION IN DISCONTINUOUS THIN FILMS
J. E. Morris and I. Boonpikum

 
Back to conference´s program