20Congreso Nacional 
Sociedad Mexicana de Ciencia de Superficies y Vacío A.C.

Microanalysis of Thin Films

Angus Rockett,
U.S. Department of Energy,
SC-13, Office of Basic Energy Sciences, 19901 Germantown Rd., Germantown, MD 20874

This Tuitorial briefly introduces the most common analysis techniques for
the study of the chemistry and structure of thin film materials.  Techniques
covered include surface analysis methods [scanning electron microscopy
(SEM), Auger electron spectroscopy (AES), photoelectron spectroscopy (XPS
and UPS), and scanning probe techniques (STM, AFM, NSOM)], and bulk analysis
techniques [x-ray diffraction (XRD), transmission electron microscopy (TEM),
secondary ion mass spectrometry (SIMS), and Rutherford backscattering
spectroscopy (RBS)].  Related methods such as energy dispersive analysis
(EDS) are discussed in connection with the primary analysis techniques.

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