Superficies y Vacío
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Fundamentals of Creating and Maintaining a Vacuum
     Paul H. Holloway
         Department of Materials Science and Engineering
        University of Florida
            Gainesville, FL 32611-6400

The fundamentals of creating and maintaining vacuum for high technology processes will be described. The discussion will begin with a
brief history of the development of vacuum and the ideal gas law. The velocity, impingement rate, and molecular mean free path of an
ideal gas will be related to phenomena in a vacuum, and used to develop the concepts of volumetric flow rate, pumping speed,
conductance and throughput. The concepts of viscous and molecular flow regimes will be developed and related to operation of vacuum
systems. The types of pumps used to create and maintain vacuums will be described, including wet and dry roughing/backing pumps,
and high vacuum diffusion, turbomolecular, cryo and getter ion pumps. The gauges appropriate to measurement of vacuum will be
discussed, including roughing gauges, high and ultrahigh vacuum gauges, residual gas analyzers, and mass flow contollers. Hardware
used in vacuum systems will be reviewed. Finally, vacuum system pump down curves will be illustrated and related to materials
selection, outgassing and leaks. Procedures to reduce outgassing by baking and cleaning will be described.


Principal
Organización
Información General
Formato del  Resumen
Memorias
Premios
Registro
Hospedaje
Información para Exhibidores